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DEVICE VERTICAL MOVEMENT OF PLATES OF TECHNOLOGY MAGAZINE INTO TRANSPORT IN THEIR washing and drying using the Marangoni effect
DEVICE VERTICAL MOVEMENT OF PLATES OF TECHNOLOGY MAGAZINE INTO TRANSPORT IN THEIR washing and drying using the Marangoni effect
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机译：设备杂志垂直移动到利用Marangoni效应进行洗涤和干燥的运输过程中
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摘要
To provide a plane-parallel vertical movement of the wafer and overcome the surface tension forces generated when they pass through the layer "liquid-gas" (water - vapors of isopropyl alcohol), an apparatus, a pusher, which in addition to its two supports provides for the wafer yet a third pivot point, shifting the plate to the edge of the cassette. This is to prevent breakage of the plates because of their clamping force under the effect of surface tension and contact with the two plates in one slot of the transport cassettes. The device is a pusher, made in the form of two hollow support rods of a polymeric material placed horizontally and attached to the rod of the vertical movement mechanism. On the support rods are hollow, limiting the horizontal displacement plate, keeping a constant distance between the plates. One support rod disposed on a rod mechanism vertical movement axis, the second - parallel to the first, but is shifted away and lifted, thereby allowing displacement of the plates in the opposite second rod process cartridge fully into the groove bottom of the groove. Thus, the plate, moving from the process cartridge into the transport, is fixed at three points: slides on the cassette groove bottom and at the same time rests on the two bearing hollow shaft being in their slots, thus providing a strictly perpendicular to the upward movement of the plates parallel to each other and to clear their hit in the transport cassette slots. In the description of utility model given the technological and constructive features of the device, allowing movement through the plane-parallel plates overload them from the process cartridge into the transport, while respecting the process of washing and drying of the plates by the Marangoni method. In the description of utility model specified field of application, a brief description of the design features and facilities where this device may be used. The algorithm for operation of the device in an installation cleaning isushki plates. Static and dynamic operation of the device shown graphically.
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