METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS WITH ENHANCED EFFICIENCY

• 1. 用于产生特别是EUV辐射和/或软X射线辐射的方法和设备 [P] . 中国专利： CN101390453B . 2011.08.03
• 2. 用于产生特别是EUV辐射和/或软X射线辐射的方法和设备 [P] . 中国专利： CN101390453A . 2009-03-18
• 3. METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS WITH ENHANCED EFFICIENCY [P] . 欧洲知识产权局专利： EP2380411B1 . 2015-04-15

  机译： 产生具有较高效率的EUV辐射或软X射线的方法和装置

• 4. Method and device for generating EUV radiation or soft X-rays with enhanced efficiency [P] . 美国专利： US8253123B2 . 2012-08-28

  机译： 产生效率更高的euv辐射或软x射线的方法和装置

• 5. METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS WITH ENHANCED EFFICIENCY [P] . 韩国专利： KR20110096585A . 2011-08-30

  机译： 产生效率更高的EUV辐射或软X射线的方法和装置

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