NOZZLE UNIT FOR SPRAY PYROLYSIS DEPOSITION, THIN FILM DEPOSITING DEVICE INCLUDING SAME AND METHOD FOR FORMING THIN FILM OF FLUORINE-CONTAINING TIN OXIDE

• 1. 薄膜沉积装置以及使用该薄膜沉积装置的薄膜沉积方法 [P] . 中国专利： CN103866237B . 2018.04.06
• 2. 薄膜沉积装置和使用该薄膜沉积装置的薄膜沉积方法 [P] . 中国专利： CN104419892A . 2015-03-18
• 3. NOZZLE UNIT FOR SPRAY PYROLYSIS DEPOSITION, THIN FILM FORMING APPARATUS COMPRISING SAME, AND METHOD FOR FORMING FLUORINE-CONTAINING TIN OXIDE THIN FILM [P] . 世界知识产权组织专利： WO2017047845A1 . 2017-03-23

  机译： 用于喷雾热解沉积的喷嘴单元，包括该喷嘴单元的薄膜形成装置以及用于形成含氟氧化锡薄膜的方法

• 4. CRUCIBLE DEVICE FOR THIN FILM DEPOSITION, COMPRISING A HEATING UNIT AND A PLURALITY OF ORGANIC MATERIAL SPRAY NOZZLES, AND A THIN FILM DEPOSITION APPARATUS INCLUDING THE SAME [P] . 韩国专利： KR20120090649A . 2012-08-17

  机译： 薄膜沉积的坩埚装置，包括加热单元和多个有机材料喷嘴，以及包括该膜的薄膜沉积装置

• 5. NOZZLE FOR SPRAY PYROLYSIS DEPOSITION AND DEVICE FOR FORMING THIN FILM INCLUDING SAME [P] . 韩国专利： KR20160140282A . 2016-12-07

  机译： 用于喷雾热解沉积的喷嘴和用于形成包括相同薄膜的薄膜的装置

• 1. Role of substrate temperature on the ammonia gas sensing performance of Mg-doped ZnO thin films deposited by spray pyrolysis technique: application in breath analysis devices [J] . S. Goudarzi, K. Khojier Applied Physics . 2018,第9期
• 2. Multi Band Gap Cu (In,Ga) (S,Se)2 Thin Films Deposited By Spray Pyrolysis for High Performance Solar Cell Devices [J] . Muhammad Aamir Hassan, Mohammad Mujahid, Lydia Helena Wong Materials science forum . 2016,第期
• 3. Influence of deposition conditions on structural, electrical, and optical properties of cadmium oxide thin films deposited using the spray pyrolysis technique [J] . M.R.Sayas, M.R.Fadavieslam Journal of materials science . 2020,第21期
• 4. Effect of Deposition Conditions upon Gas Sensitivity of Zinc Oxide Thin Films Deposited by Spray Pyrolysis [C] . E. F, R. Martins, P. Vilarinho, International conference on polycrystalline semiconductors . 2001
• 5. Metal-organic chemical vapor deposition of indium oxide based transparent conducting oxide thin films: Precursor synthesis, film growth and characterization, and their application in polymer light-emitting diode devices. [D] . Ni, Jun. 2005
• 6. Undoped and Nickel-Doped Zinc Oxide Thin Films Deposited by Dip Coating and Ultrasonic Spray Pyrolysis Methods for Propane and Carbon Monoxide Sensing Applications [O] . Tangirala Venkata Krishna Karthik, María de la Luz Olvera, Arturo Maldonado, 2020
• 7. Undoped and Nickel-Doped Zinc Oxide Thin Films Deposited by Dip Coating and Ultrasonic Spray Pyrolysis Methods for Propane and Carbon Monoxide Sensing Applications [O] . Tangirala Venkata Krishna Karthik, María de la Luz Olvera, Arturo Maldonado, 2020

• 1. Study of thin Films of Nickel Oxide (NiO) Deposited by the Spray Pyrolysis Method [J] . Antar Bouhank12 ,Youcef. Bellal1 ,Hacene Serrar1 . 化学与化工 . 2018,第003期
• 2. Spray Pyrolysis Deposition of Single and Mixed Oxide Thin Films [J] . Olusegun J. Ilegbusi ,S. M. Navid Khatami ,Leonid I. Trakhtenberg . 材料科学与应用期刊（英文） . 2017,第2期
• 3. Study of Optical and Electrical Properties of Nickel Oxide (NiO) Thin Films Deposited by Using a Spray Pyrolysis Technique [J] . Ahmed J. Hassan . 现代物理（英文） . 2014,第18期
• 4. Phase Transition in Superconducting Thin Films of Tl System Employing a One-Zone Furnace and Deposited by Spray Pyrolysis [J] . Jorge Luis Rosas-Mendoza ,L. Perez-Arrieta ,Miguel Aguilar-Frutis . 材料科学与应用期刊（英文） . 2013,第11期
• 5. Mathematical Modeling and Experimental Validation of Mixed Metal Oxide Thin Film Deposition by Spray Pyrolysis [J] . S. M. Navid Khatami ,Olusegun J. Ilegbusi ,Leonid I. Trakhtenberg . 材料科学与应用期刊（英文） . 2015,第1期
• 6. 薄膜沉积的影响因素和修正方法的研究 [C] . . 五省一市光学学会联合年会暨十三省市光学学会联合年会 . 2008
• 7. 薄膜沉积扩散形成的数值研究 [A] . 金艳梅 . 2008