DROPLET JET FORMATION DEVICE AND DROPLET JET FORMATION METHOD
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机译：液滴射流形成装置及液滴射流形成方法
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摘要
[Problem] To provide a device and a method which yield finer droplets than before and thereby have a high cleaning ability without damaging an object to be cleaned.[Solution] The device has been configured so that a stream of water vapor is mixed with a stream of a gas inside or outside a channel to thereby condense the water vapor to form a droplet jet.
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