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STIFFNESS FREQUENCY ADJUSTABLE TWO-DIMENSIONAL MICRO MOTION PLATFORM BASED ON THE STRESS STIFFENING PRINCIPLE

机译:基于应力刚度原理的刚度频率可调整二维微动平台

摘要

A stiffness frequency adjustable two-dimensional micro motion platform based on the stress stiffening principle comprises an X-movement and a Y-movement sub-platforms (203,204) and relevant actuators, a micro motion working platform (5), and film groups (201,202) to adjust the tension by means of screws (7,11) are used as a flexible hinge, thus an independent adjustment for vibration frequency of the two-dimensional micro motion platform can be achieved. Based on the adjustable pre-stress films, the micro motion platform can adjust the natural frequency of the micro motion platform according to different working conditions and driving frequency, and provides two orthogonal feeding movement directions so as to avoid the generation of jiggling process of the micro motion working platform in a two-dimensional motion. And the platform is used for the precision displacement compensation of a general X/Y-movement platform.
机译:基于应力强化原理的可调整频率的二维微动平台,包括X运动和Y运动子平台(203,204)和相关的执行器,微动工作平台(5)和薄膜组(201,202)通过使用螺钉(7,11)作为柔性铰链来调节张力,从而可以实现对二维微动平台振动频率的独立调节。基于可调节的预应力膜,微动平台可以根据不同的工作条件和驱动频率来调节微动平台的固有频率,并提供两个正交的进给运动方向,从而避免了微动平台产生抖动的过程。二维运动中的微动工作平台。该平台用于一般X / Y移动平台的精确位移补偿。

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