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STIFFNESS FREQUENCY ADJUSTABLE TWO-DIMENSIONAL MICRO MOTION PLATFORM BASED ON THE STRESS STIFFENING PRINCIPLE
STIFFNESS FREQUENCY ADJUSTABLE TWO-DIMENSIONAL MICRO MOTION PLATFORM BASED ON THE STRESS STIFFENING PRINCIPLE
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机译:基于应力刚度原理的刚度频率可调整二维微动平台
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摘要
A stiffness frequency adjustable two-dimensional micro motion platform based on the stress stiffening principle comprises an X-movement and a Y-movement sub-platforms (203,204) and relevant actuators, a micro motion working platform (5), and film groups (201,202) to adjust the tension by means of screws (7,11) are used as a flexible hinge, thus an independent adjustment for vibration frequency of the two-dimensional micro motion platform can be achieved. Based on the adjustable pre-stress films, the micro motion platform can adjust the natural frequency of the micro motion platform according to different working conditions and driving frequency, and provides two orthogonal feeding movement directions so as to avoid the generation of jiggling process of the micro motion working platform in a two-dimensional motion. And the platform is used for the precision displacement compensation of a general X/Y-movement platform.
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