首页> 外国专利> THINNING METHOD FOR PYROELECTRIC RELAXOR FERROELECTRIC SINGLE CRYSTAL

THINNING METHOD FOR PYROELECTRIC RELAXOR FERROELECTRIC SINGLE CRYSTAL

机译:热释电铁电单晶的稀疏方法

摘要

A thinning method for a pyroelectric relaxor ferroelectric single crystal, comprising rough grinding being performed on a first surface of a single crystal and chemical mechanical polishing being performed on the rough-ground first surface, rough grinding being performed on a second surface of the single crystal and chemical mechanical polishing being performed on the rough-ground second surface, wet etching being performed on the ground single crystal, and high temperature annealing treatment being performed on the etched single crystal. A combination of grinding, etching and annealing is used, attaining effective thinning of pyroelectric relaxor ferroelectric single crystal material, and ensuring the performance of the material after thinning.
机译:用于热电弛豫铁电单晶的减薄方法,包括在单晶的第一表面上进行粗磨,并且在经粗磨的第一表面上进行化学机械抛光,在单晶的第二表面上进行粗磨。然后,在粗糙的第二表面上进行化学机械抛光,对研磨后的单晶进行湿蚀刻,并对蚀刻后的单晶进行高温退火处理。结合使用研磨,蚀刻和退火,可以使热电弛豫铁电单晶材料有效减薄,并确保减薄后材料的性能。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号