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PIEZOELECTRIC DEVICE FOR ENERGY RECOVERY
PIEZOELECTRIC DEVICE FOR ENERGY RECOVERY
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机译：压电式能量回收装置
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摘要
The invention relates to a technical device of the micro-electro-mechanical system type carried out by microtechnology processes, intended for the recovery of electrical energy from mechanical vibrations or shocks. According to the invention, the device comprises a single-crystal silicon support (1) and a matrix (2) of in-built bars of various lengths, each of them consisting of the following elements: a passive silicon element (3), an active piezoelectric element (4) for generating electric charges, an upper electrode (5) and a lower electrode (6) for taking over electric charges, a dielectric layer (7) which insulates the electric signals in relation with the silicon element (3), a connecting wire (8) achieving the electric contact between the upper electrode (5) and some electric paths (9) which convey the electric energy generated by the active piezoelectric element (4) towards the exterior.
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