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Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen

机译:用于电子显微镜,电子显微镜,电子显微镜的观察样品以及用于产生观察样品的装置

摘要

The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
机译:抑制了一次电子设备的充电,以从观察样本(即,待观察的样本)产生清晰的边缘对比度,从而可以高精度地测量样本的表面形状。使用其中在样品上以薄膜状或织带状形式形成包含离子液体的液体介质的观察样品。使用观察样品的电子显微镜包括:测量样品上包含离子液体的液体介质的厚度的步骤;根据包含离子液体的液体介质的厚度,控制一次电子辐照条件的步骤;在上述一次电子辐照条件下用一次电子辐照样品以形成样品形状的图像的步骤。

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