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Method for manufacturing capacitive micromachined ultrasonic transducer and apparatus configured to obtain subject information using the capacitive micromachined ultrasonic transducer
Method for manufacturing capacitive micromachined ultrasonic transducer and apparatus configured to obtain subject information using the capacitive micromachined ultrasonic transducer
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机译：制造电容式微加工超声换能器的方法和配置为使用电容式微加工超声换能器获得对象信息的设备
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摘要
There is provided a method for manufacturing a capacitive micromachined ultrasonic transducer. In this method, a first insulating layer and a vibrating membrane are bonded by heat treatment and a second insulating layer is formed by thermal oxidation in a single heating step, with a cavity provided in the transducer communicating with the outside of the transducer through a communication portion.
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