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Optical force sensor and apparatus using optical force sensor
Optical force sensor and apparatus using optical force sensor
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机译：光学力传感器和使用该光学力传感器的设备
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摘要
The optical force sensor includes a base member, a displaceable member, an elastic member disposed between the base and displaceable members and a displacement detector optically detecting a displacement of the displaceable member caused by an external force. The displacement detector causes first and second light fluxes to form interference fringes on a first light-receiving element. The first light flux from a light source is internally reflected at a gap-side surface of a light-transmissive member. The second light flux from the light source is transmitted through the light-transmissive member, reflected by a reflective surface provided to the displaceable member and again transmitted through the light-transmissive member. The displacement detector outputs, from the first light-receiving element, a signal corresponding to a variation in intensity distribution of the interference fringes.
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