首页> 外国专利> Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system

Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system

机译:光束引导系统,用于将放射线从大功率激光光源向目标物聚焦引导,以及包括激光光源和这种光束引导系统的LPP X射线源

摘要

A beam guidance system serves for the focusing guidance of radiation from a high-power laser light source toward a target. The beam guidance system has at least one mirror as reflective beam guidance component and at least one transmission component which is at least partially transmissive to the radiation as refractive beam guidance component. The arrangement of the at least one mirror and of the at least one transmission component is such that beam-induced changes to the beam guidance properties of the at least one mirror are at least partly compensated for by beam-induced changes to the beam guidance properties of the at least one transmission component. This results in a beam guidance system in which beam-induced changes to the beam guidance properties of the beam guidance system do not have a disturbing effect on the focusing guidance of the radiation from the laser light source.
机译:光束引导系统用于将来自大功率激光光源的辐射聚焦引导至目标。光束引导系统具有至少一个反射镜作为反射光束引导组件以及至少一个透射组件,该透射组件至少部分地透射辐射作为折射光束引导组件。至少一个反射镜和至少一个透射组件的布置使得,至少一个反射镜的光束诱导的光束引导特性的变化至少部分地由光束诱导的光束引导特性的变化来补偿。至少一个传动部件中的一个。这导致光束引导系统,其中光束引起的光束引导系统的光束引导特性的变化不会对来自激光源的辐射的聚焦引导产生干扰作用。

著录项

  • 公开/公告号US9444214B2

    专利类型

  • 公开/公告日2016-09-13

    原文格式PDF

  • 申请/专利权人 CARL ZEISS SMT GMBH;

    申请/专利号US201414320045

  • 发明设计人 UDO DINGER;

    申请日2014-06-30

  • 分类号G03F7/20;H01S3/034;G02B27/00;H05G2/00;G02B7/00;B23K26/03;B23K26/06;G02B7/18;

  • 国家 US

  • 入库时间 2022-08-21 14:32:38

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