首页> 外国专利> Outlier Detection on Pattern of Interest Image Populations

Outlier Detection on Pattern of Interest Image Populations

机译:兴趣图像种群格局的离群值检测

摘要

Methods and systems for identifying outliers in multiple instances of a pattern of interest (POI) are provided. One system includes one or more computer subsystems configured for acquiring images generated by an imaging subsystem at multiple instances of a POI within a die formed on the specimen. The multiple instances include two or more instances that are located at aperiodic locations within the die. The computer subsystem(s) are also configured for determining a feature of each of the images generated at the multiple instances of the POI. In addition, the computer subsystem(s) are configured for identifying one or more outliers in the multiple instances of the POI based on the determined features.
机译:提供了用于在关注模式(POI)的多个实例中识别离群值的方法和系统。一个系统包括一个或多个计算机子系统,该子系统被配置为获取在样本上形成的模具内的POI的多个实例处由成像子系统生成的图像。多个实例包括位于管芯内的非周期性位置处的两个或更多个实例。计算机子系统还被配置为确定在POI的多个实例处生成的每个图像的特征。另外,计算机子系统被配置为基于所确定的特征来识别POI的多个实例中的一个或多个离群值。

著录项

  • 公开/公告号US2016314578A1

    专利类型

  • 公开/公告日2016-10-27

    原文格式PDF

  • 申请/专利权人 KLA-TENCOR CORPORATION;

    申请/专利号US201615135465

  • 发明设计人 SAIBAL BANERJEE;ASHOK V. KULKARNI;

    申请日2016-04-21

  • 分类号G06T7;

  • 国家 US

  • 入库时间 2022-08-21 14:38:49

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号