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C12A7 elect Ride method of a thin film of the production, and the thin film of the C12A7 elect Ride
C12A7 elect Ride method of a thin film of the production, and the thin film of the C12A7 elect Ride
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机译:生产的薄膜的C12A7选Ride方法,而C12A7的薄膜选Ride
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摘要
C12A7 a method for producing a thin film of the elect ride, an electron density of 2.0 10 18 cm -3 ~2.3 10 21 cm -3 with crystalline C12A7 electride targets, in an atmosphere of low oxygen partial pressure, by a vapor deposition method, to form a film on a substrate the manufacturing method characterized by forming a thin film of amorphous C12A7 electride.
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机译:C12A7一种生产电沉积薄膜的方法,电子密度为2.0 10 18 Sup> cm -3 Sup>〜2.3 10 21 Sup> cm < Sup> -3 Sup>用结晶的C12A7驻极体,在低氧分压的气氛中,通过汽相沉积法在衬底上形成膜,其制造方法的特征在于形成非晶C12A7驻极体的薄膜。
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