首页>
外国专利>
Method for manufacturing solar cell using inductively coupled plasma enhanced chemical vapor deposition
Method for manufacturing solar cell using inductively coupled plasma enhanced chemical vapor deposition
展开▼
机译：使用电感耦合等离子体增强化学气相沉积制造太阳能电池的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A method for fabricating a solar cell through inductively coupled plasma chemical vapor deposition is provided to achieve a micro-crystallized intrinsic layer of a solar cell. CONSTITUTION: A method for fabricating a solar cell through inductively coupled plasma chemical vapor deposition comprises steps of: forming an intrinsic layer of a solar cell using an inductively coupled plasma chemical vapor deposition apparatus which uses a mixed gas including hydrogen gas and silane gas. The solar cell includes a first electrode(210), a first type layer(220), the intrinsic layer(230), a second type layer(240), and a second electrode(250).
展开▼
