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Interference heterodyne optical encoder system
Interference heterodyne optical encoder system
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机译：干涉外差光学编码器系统
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摘要
Wherein the interferometer is arranged to receive the second beam and the first beam having different frequencies, in the encoder interference system, interferometer, encoder interfering system is the first beam along the measurement path and a polarizing beam splitting element at least one directing, defines a measurement beam to direct the second beam along the reference path, defining the reference beam. The encoder interfering system is a detector disposed between the encoder scale disposed once, so as to diffract a measurement beam, at least, to receive the measurement and reference beams after the measurement beam diffracted from the encoder scale, output that is arranged to receive the measurement and reference beams prior to deflect the spurious portion of the second beam and the first beam away from the detector and the reference beam and measurement beam reaches the detector I and a component.
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