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Defect analyzer substrate, the substrate processing system, defect analysis method for a substrate, a program and a computer storage medium
Defect analyzer substrate, the substrate processing system, defect analysis method for a substrate, a program and a computer storage medium
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机译：缺陷分析仪基板，基板处理系统，基板的缺陷分析方法，程序和计算机存储介质
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摘要
PROBLEM TO BE SOLVED: To prevent potential trouble by analyzing defects of a wafer.SOLUTION: There is provided a device for analyzing defects of a substrate, the device including an imaging device that photographs a substrate to be inspected, a defect feature amount extraction unit that extracts the feature amount of defects in the surface of the substrate on the basis of the photographed image of the substrate, a defect feature amount integration unit that integrates the feature amounts of the defects of a plurality of substrates to create integrated data AH, a defect determination unit that determines whether or not the integrated feature amounts of the defects exceed a predetermined threshold, and an output unit that outputs a result of the determination by the defect determination unit.
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