PROBLEM TO BE SOLVED: To provide a silica particle that hardly releases α rays, has excellent dispersibility in resin, and can be contained in a semiconductor mounting paste.;SOLUTION: The present invention relates to a silica particle in which the ratio of uranium mass to silicon oxide mass (in terms of SiO2) is 2 ppb or less (U/SiO2), the ratio of thorium mass to silicon oxide mass (in terms of SiO2) is 2 ppb or less (Th/SiO2), the ratio of alkali metal element mass to silicon oxide mass (in terms of SiO2) is 10-1000 ppm (alkali metal element/SiO2), and an average particle diameter measured by a dynamic light scattering method is 10 nm-10 μm.;COPYRIGHT: (C)2016,JPO&INPIT
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