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Deposition environment inspection mask assembly, vapor deposition equipment including the vapor deposition environment inspection mask assembly, and vapor deposition environment inspection method using the vapor deposition equipment

机译:沉积环境检查掩模组件,包括气相沉积环境检查掩模组件的气相沉积设备以及使用该气相沉积设备的气相沉积环境检查方法

摘要

A deposition apparatus includes deposition sources (S1, S2, S3, S4), a deposition chamber (CB), a mask assembly (MA, MA10, MA20, MA30), and a transfer unit (TP). The mask assembly (MA, MA10, MA20, MA30) includes a support member (10), a shutter member (20), and a drive member (30). The support member (10) has a first opening (OP1) configured to allow the deposition materials (M1, M2, M3, M4) to pass through while supporting the base substrate (SUB) on which the deposition materials are deposited. The shutter member (20) is accommodated in the support member (10) and has a second opening (OP2) smaller than the first opening (OP1). The drive member (30) is configured to change a position of the second opening (OP2) with respect to the base substrate (SUB) in accordance with the movement of the mask assembly (MA, MA10, MA20, MA30).
机译:沉积设备包括沉积源(S1,S2,S3,S4),沉积室(CB),掩模组件(MA,MA10,MA20,MA30)和转印单元(TP)。面罩组件(MA,MA10,MA20,MA30)包括支撑构件(10),挡板构件(20)和驱动构件(30)。支撑构件(10)具有第一开口(OP1),该第一开口构造成允许沉积材料(M1,M2,M3,M4)通过,同时支撑其上沉积有沉积材料的基础基板(SUB)。活门构件(20)被容纳在支撑构件(10)中并且具有小于第一开口(OP1)的第二开口(OP2)。驱动构件(30)构造成根据掩模组件(MA,MA10,MA20,MA30)的移动来改变第二开口(OP2)相对于基础基板(SUB)的位置。

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