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merY. Process gas abatement equipment and abatement methods
merY. Process gas abatement equipment and abatement methods
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机译：好吧工艺气体减排设备及减排方法
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摘要
It is to provide an improved technique for processing the [challenge] the exhaust gas flow has a process gas abatement device burner of The present invention, the burner is equipped with a combustion chamber, the combustion chamber, quasi-within the combustion chamber to accept the exhaust gas flow from the manufacturing process tool can operates to process at atmospheric pressure, and further the combustion chamber, fuel can operates to receive an oxidizing agent and a diluent, fuel, oxidant and diluent controls the combustion in the combustion chamber to process the exhaust gas stream, generating a processed exhaust stream, the diluent can be condensed in the discharge stream, which is processed. By supplying a diluent condensable form inert, reduced the volume gain of the combustion chamber, the volume load acting on this for the volume of the effluent stream is reduced and the second pump is reduced. Thus, the volume of gas from the combustion chamber needs to be raised to atmospheric pressure by the second pump there is reduced, thereby reducing the considerable powerFIELD 1
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