首页> 外国专利> LIQUID DROPLET VOLUME MEASUREMENT DEVICE, LIQUID DROPLET VOLUME MEASUREMENT METHOD, LIQUID DROPLET VOLUME MEASUREMENT SUBSTRATE AND INK JET DRAWING DEVICE

LIQUID DROPLET VOLUME MEASUREMENT DEVICE, LIQUID DROPLET VOLUME MEASUREMENT METHOD, LIQUID DROPLET VOLUME MEASUREMENT SUBSTRATE AND INK JET DRAWING DEVICE

机译:液体滴量测量装置,液体滴量测量方法,液体滴量测量基质和喷墨打印机

摘要

PROBLEM TO BE SOLVED: To accurately measure the volume of a liquid droplet discharged by an ink jet system.SOLUTION: A ring-shaped light source 12 and a camera 11 are provided above a liquid droplet L on a measurement substrate S so that a central axis of the ring-shaped light source and an optical axis of the camera 11 agree with each other and pass through an apex of the liquid droplet L and a radial direction of the ring-shaped light source 12 and a surface of the measurement substrate S are parallel to each other. A radius x of a ring of reflection of light with which the liquid droplet L is irradiated from the ring-shaped light source is determined on the basis of an image of the liquid droplet L captured by the camera 11 in the state of lighting the ring-shaped light source and a radius A of the liquid droplet L is determined on the basis of an image of the liquid droplet L captured by the camera 11 in the state of irradiating the liquid droplet L with light from the lower side of the measurement substrate S, so as to calculate the volume of the liquid droplet L using the radius x and the radius A.SELECTED DRAWING: Figure 1
机译:解决的问题:为了准确地测量由喷墨系统排出的液滴的体积。解决方案:在测量基板S上的液滴L上方设置环形光源12和照相机11,以使中心环形光源的轴线与照相机11的光轴一致,并且穿过液滴L的顶点,环形光源12的径向和测量基板S的表面。彼此平行。基于在环形照明的状态下由照相机11捕获的液滴L的图像,确定从环形光源照射液滴L的光的反射环的半径x。形状的光源和液滴L的半径A基于在从测量基板的下侧照射光L的状态下由照相机11捕获的液滴L的图像来确定。 S,以便使用半径x和半径A计算液滴L的体积。图1

著录项

  • 公开/公告号JP2016191636A

    专利类型

  • 公开/公告日2016-11-10

    原文格式PDF

  • 申请/专利权人 TOKYO ELECTRON LTD;

    申请/专利号JP20150072072

  • 申请日2015-03-31

  • 分类号G01B11/02;B05C5;B05C11/10;B05C11;H01L51/50;H05B33/12;

  • 国家 JP

  • 入库时间 2022-08-21 14:45:55

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