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DISTANCE METROLOGY DEVICE, DISTANCE METROLOGY METHOD AND DISTANCE METROLOGY PROGRAM
DISTANCE METROLOGY DEVICE, DISTANCE METROLOGY METHOD AND DISTANCE METROLOGY PROGRAM
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机译：距离计量装置，距离计量方法及距离计量程序
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摘要
PROBLEM TO BE SOLVED: To provide a distance metrology device, distance metrology method and distance metrology program that can alleviate a wrong measurement arising from a reflection upon a lens.;SOLUTION: A distance metrology device comprises: an angle change unit that can change an irradiation angle for irradiating a lens with laser light; a light reception element that receives return light of the laser light passing through the lens and returned by a reflection upon an object of measurement via the lens; an acquisition unit that acquires an influence of a reflection of a surface on an incident side of the laser light in the lens in accordance with the irradiation angle; and a correction unit that uses the influence of the reflection acquired by the acquisition unit to correct a signal to be output by the light reception element.;COPYRIGHT: (C)2016,JPO&INPIT
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