首页> 外国专利> POROUS AMORPHOUS SELENIUM FILM, IMAGING DEVICE, METHOD OF PRODUCING POROUS AMORPHOUS SELENIUM FILM, METHOD OF MANUFACTURING IMAGING DEVICE

POROUS AMORPHOUS SELENIUM FILM, IMAGING DEVICE, METHOD OF PRODUCING POROUS AMORPHOUS SELENIUM FILM, METHOD OF MANUFACTURING IMAGING DEVICE

机译:多孔非晶硒膜,成像设备,制造多孔非晶硒膜的方法,制造成像设备的方法

摘要

PROBLEM TO BE SOLVED: To provide a material that is less likely to be scattered even if irradiated with an electron beam, and to provide a method of producing the same.SOLUTION: A porous amorphous selenium film may have a density of 2.70-4.20 g/cm. The porous amorphous selenium film may be used as any one or more of an electron beam landing layer, a photoelectric conversion film, a hole injection blocking reinforcing layer, and an antistatic layer of electron microscope observation sample. A method of producing a porous amorphous selenium film deposits a porous amorphous selenium film in a gas atmosphere of 1.0-2.0 Torr pressure.SELECTED DRAWING: Figure 1
机译:解决的问题:提供一种即使受到电子束照射也不太可能散射的材料,并提供一种制造该材料的方法。解决方案:多孔非晶硒膜的密度为2.70-4.20 g /厘米。多孔非晶硒膜可以用作电子显微镜观察样品的电子束着陆层,光电转换膜,空穴注入阻挡增强层和抗静电层中的任何一种或多种。一种制备多孔非晶硒膜的方法是在1.0-2.0 Torr压力的气体气氛中沉积多孔非晶硒膜。

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