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X-RAY DIFFRACTION MICROSCOPE AND X-RAY DIFFRACTION MEASUREMENT METHOD USING X-RAY DIFFRACTION MICROSCOPE

机译:X射线衍射显微镜及使用X射线衍射显微镜的X射线衍射测定方法

摘要

An X-ray diffraction microscope apparatus (1) has an X-ray generating apparatus (2), a sample stage (3), a collimator (4) serving to suppress angle divergence, a two-dimensional X-ray detector (5) having an energy resolving power, an image processing apparatus, and an image recording and displaying apparatus (6). An angle divergence of diffracted X-rays is suppressed by moving a sample (7) and the two-dimensional X-ray detector (5) as close as possible via the collimator (4). The diffracted X-rays are measured and imaged in a state in which the two-dimensional X-ray detector (5) and the sample stage (3) are at a standstill without being moved. Accordingly, it is possible to provide an X-ray diffraction microscope apparatus which can acquire an image in an extremely short time, and can image a difference of an inhomogeneous sample, a material in which different crystal structures exist in one sample or a sample in which textures having different directions are contained and an X-ray diffraction measuring method using the X-ray diffraction microscope apparatus.
机译:X射线衍射显微镜装置(1)具有X射线产生装置(2),样品台(3),用于抑制角度发散的准直仪(4),二维X射线检测器(5)。具有能量分辨能力的图像处理装置,图像记录显示装置(6)。通过使样品(7)和二维X射线检测器(5)经由准直仪(4)尽可能靠近,可以抑制衍射X射线的角度发散。在二维X射线检测器(5)和样品台(3)静止不动的状态下对衍射的X射线进行测量和成像。因此,可以提供一种X射线衍射显微镜装置,其可以在极短的时间内获取图像,并且可以对不均匀的样品,其中一个样品中存在不同晶体结构的材料或其中的样品中存在不同晶体的材料进行成像。包含具有不同方向的纹理的材料,以及使用X射线衍射显微镜设备的X射线衍射测量方法。

著录项

  • 公开/公告号EP1672361B1

    专利类型

  • 公开/公告日2016-06-01

    原文格式PDF

  • 申请/专利权人 NAT INST FOR MATERIALS SCIENCE;

    申请/专利号EP20040773156

  • 发明设计人 SAKURAI KENJI;MIZUSAWA TAZUKO;

    申请日2004-09-09

  • 分类号G01N23/207;G21K7;

  • 国家 EP

  • 入库时间 2022-08-21 14:53:03

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