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JIG FOR PEELING PELLICLE AND PEELING METHOD
JIG FOR PEELING PELLICLE AND PEELING METHOD
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机译:去皮丸的治具及去皮方法
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摘要
The present invention provides a simple jig and peeling method that can easily and safely peel a pellicle adhered to a photomask. The positional relationship between the photomask and the pellicle is fixed by the pellicle peeling jig having the fixing member for the photomask and the adhesive layer for the pellicle, and the mask adhesive layer is taken out and removed in a fixed state.
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