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Polycrystalline MgO sintered compact, process for producing the polycrystalline MgO sintered compact, and MgO target for sputtering
Polycrystalline MgO sintered compact, process for producing the polycrystalline MgO sintered compact, and MgO target for sputtering
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机译：多晶MgO烧结体，多晶MgO烧结体的制造方法以及溅射用MgO靶
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摘要
Sintered density is close to the theoretical density, mechanical properties, and thermal conductivity is good, Mg0 sintered body and a manufacturing method capable of reducing the contamination of the atmosphere of the gas generator is disclosed. Wherein the Mg0 sintered polycrystalline MgO sintered body having a unique crystal orientation anisotropy which a lot of (111) plane on the surface was added to a uniaxial pressure. The polycrystalline MgO sintered body, and the grain size of 1 m or less of uniaxial hot pressing the MgO raw material powder process, and then the oxygen to obtain a 0.05% by volume or more of a heat treatment for at least 1 minute at a temperature above 1273K in the presence of the atmosphere by performing the process .
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