DESIGN RULE GENERATING APPARATUS AND METHOD USING LITHOGRAPHY SIMULATION

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• 3. Design rule generating apparatus and method using lithography simulation [P] . KR102227127B1 . 2021-03-12

  机译： 使用光刻模拟设计规则生成装置和方法

• 4. DESIGN RULE GENERATING APPARATUS AND METHOD USING LITHOGRAPHY SIMULATION [P] . 美国专利： US2015227673A1 . 2015-08-13

  机译： 设计规则生成装置和使用光刻技术的方法

• 5. Rule generating apparatus and method using lithography simulation [P] . 美国专利： US9230053B2 . 2016-01-05

  机译： 使用光刻模拟的规则生成装置和方法

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