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HAZARDOUS AND NOXIOUS SUBSTANCE DETECTION SENSOR STRUCTURE FOR DETECTING HAZARDOUS AND NOXIOUS SUBSTANCE CONTAINED IN SEAWATER USING DIFFUSION FLOW, AND METHOD FOR MANUFACTURING SAME
HAZARDOUS AND NOXIOUS SUBSTANCE DETECTION SENSOR STRUCTURE FOR DETECTING HAZARDOUS AND NOXIOUS SUBSTANCE CONTAINED IN SEAWATER USING DIFFUSION FLOW, AND METHOD FOR MANUFACTURING SAME
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机译：用于利用扩散流检测海水中有害和有毒物质的有害和有毒物质检测传感器结构及其制造方法
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摘要
The present invention relates to a hazardous and noxious substance detection sensor structure for detecting hazardous and noxious substances (HNS) contained in seawater using diffusion flow, capable of detecting the presence and absence of HNS contained in polluted seawater and concentration thereof by using diffusion flow of polluted seawater without an external power supply by having a pore structure, and a method for manufacturing the same. According to the present invention, the HNS detection sensor structure comprises: a nanopore formed in the hollow form in the upper side of a substrate to supply polluted seawater; a first micropore formed to be stepped from both ends of the nanopore, and whose diameter is greater than the nanopore; and a second micropore formed to be stepped from both ends of the first micropore, and whose diameter is greater than the first micropore. Moreover, normal seawater containing a lower ion concentration than the polluted seawater is supplied to the lower side of the substrate.;COPYRIGHT KIPO 2015
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