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ADVANCED EXCIMER LASER ANNEALING FOR THIN FILMS
ADVANCED EXCIMER LASER ANNEALING FOR THIN FILMS
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机译：薄膜的高级准分子激光退火
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摘要
This disclosure Si for large displays with a sudden increase in the effective crystallization rate to crystallize the film next generation laser relate to crystallization approach . Specific technique provided in this aspect of the disclosure enhanced the excimer - laser annealing referred as (AELA) method , which can use a variety of available and proven technical components to be easily configured to produce the large OLED TV. As with ELA, it is , however , after all the same with a laser source of the crystallization than that of the conventional ELA technique effective rate portion that can achieve 10 times higher increase in the - / near- full - melting - system - based approach is crystallized . ;
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