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ACTIVE SPECIES IRRADIATION DEVICE, ACTIVE SPECIES IRRADIATION METHOD AND METHOD FOR FORMING OBJECT HAVING BEEN IRRADIATED WITH ACTIVE SPECIES
ACTIVE SPECIES IRRADIATION DEVICE, ACTIVE SPECIES IRRADIATION METHOD AND METHOD FOR FORMING OBJECT HAVING BEEN IRRADIATED WITH ACTIVE SPECIES
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机译：活性物种辐照设备，活性物种辐照方法和形成被活性物种辐照的物体的方法
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摘要
An active species radiation device is for efficiently radiating active species (active oxygen or nitrogen) by using a plasma source not in contact with an irradiated object. An active species radiation device (100) includes: a chamber (110) in which flows of plasma generation gas and active species generation gas enter and which has an active species radiation port (110c) through which active species are radiated; an upstream electrode (120) positioned in a part of the chamber (110) corresponding to an upstream portion of the flow of the plasma generation gas; and a downstream electrode (130) positioned in a part of the chamber (110) corresponding to a more downstream portion of the flow of the plasma generation gas than the upstream electrode (120). The chamber (110) is configured so that the active species generation gas flows into a position between the upstream electrode (120) and the active species radiation port (110c).
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