DUMMY BARRIER LAYER FEATURES FOR PATTERNING OF SPARSELY DISTRIBUTED METAL FEATURES ON THE BARRIER WITH CMP

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• 2. 识别在掩模层上的虚拟特征的系统和方法 [P] . 中国专利： CN1547762A . 2004-11-17
• 3. DUMMY BARRIER LAYER FEATURES FOR PATTERNING OF SPARSELY DISTRIBUTED METAL FEATURES ON THE BARRIER WITH CMP [P] . 欧洲知识产权局专利： EP3047519A1 . 2016-07-27

  机译： CMP栅栏上稀疏分布金属特征的虚拟栅栏层特征

• 4. DUMMY BARRIER LAYER FEATURES FOR PATTERNING OF SPARSELY DISTRIBUTED METAL FEATURES ON THE BARRIER WITH CMP [P] . 美国专利： US2015076697A1 . 2015-03-19

  机译： CMP栅栏上稀疏分布金属特征的虚拟栅栏层特征

• 5. Dummy barrier layer for patterning metal features sparsely dispersed on barrier by CMP [P] . 日本专利： JP2016533041A . 2016-10-20

  机译： 虚拟阻挡层，用于通过CMP稀疏分散在阻挡层上的金属特征图案

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