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ZERO-RIGIDITY MAGNETIC SUSPENSION ACTIVE VIBRATION ISOLATOR AND SIX-DEGREES-OF-FREEDOM VIBRATION ISOLATION SYSTEM COMPRISED THEREOF
ZERO-RIGIDITY MAGNETIC SUSPENSION ACTIVE VIBRATION ISOLATOR AND SIX-DEGREES-OF-FREEDOM VIBRATION ISOLATION SYSTEM COMPRISED THEREOF
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机译：零刚度磁悬浮主动隔振器及由其组成的六自由度隔振系统
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摘要
The present invention relates to the field of precision vibration isolation. Disclosed are a zero-rigidity magnetic suspension active vibration isolator having a compact structure, and a six-degrees-of-freedom vibration isolation system comprised thereof. The zero-rigidity magnetic suspension active vibration isolator comprises a permanent magnetic passive vibration isolation unit, an active vibration isolation unit and a safety limiting assembly; the permanent magnetic passive vibration isolation unit comprises an upper magnet (1), a lower magnet (2), a middle magnet (3) and related connecting pieces thereof, the magnets being rectangular magnets; the active vibration isolation unit can apply positioning control and vibration active control in both vertical and horizontal directions, and comprises a Lorentz motor, a speed sensor and a displacement sensor; the safety limiting assembly has functions of mechanical levelling and safety limiting protection. The zero-rigidity magnetic suspension active vibration isolator has quasi zero rigidity while having zero rigidity in a horizontal direction and bearing capacity in a vertical direction, and the six-degrees-of-freedom vibration isolation system comprised of the zero-rigidity magnetic suspension active vibration isolator is suitable for precision machining and measurement sensitive to low-frequency vibration.
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