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Micro electro-mechanical systems (MEMS) force balance accelerometer
Micro electro-mechanical systems (MEMS) force balance accelerometer
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机译：微机电系统（MEMS）力平衡加速度计
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摘要
Micro Electro-Mechanical Systems (MEMS) accelerometer (40) and acceleration sensing methods. A MEMS accelerometer includes a proof mass (68), a planar coil (72) on the proof mass, a magnet (50), a first pole piece (54) positioned proximate a first side of the proof mass, and a second pole piece (52). A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.
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