首页> 外国专利> Compliant interconnect pillars with orientation or geometry dependent on the position on a die or formed with a patterned structure between the pillar and a die pad for reduction of thermal stress

Compliant interconnect pillars with orientation or geometry dependent on the position on a die or formed with a patterned structure between the pillar and a die pad for reduction of thermal stress

机译:顺应性的互连柱,其方向或几何形状取决于管芯上的位置,或在柱和管芯焊盘之间形成带图案的结构以减少热应力

摘要

Pillars (300 306 502) having a directed compliance geometry are arranged to couple a semiconductor die (400 500) to a substrate. The direction of maximum compliance of each pillar (300 306 502) may be aligned with the direction of maximum stress caused by unequal thermal expansion and contraction of the semiconductor die (400 500) and the substrate. Pillars (300 306 502) may be designed and constructed with various shapes having particular compliance characteristics and particular directions (302 304 308 310 504) of maximum compliance. The shape and orientation of the pillars (300 306 502) may be selected as a function of their location on a die (400 500) to accommodate the direction and magnitude of stress at their location. Pillars (610) may also be fabricated with particular shapes by patterning a material (604) such as a passivation material on a pad on a die (600) to increase the surface area upon which the pillar (610) is plated or deposited.
机译:具有定向顺应性几何形状的支柱(300 306 502)被布置为将半导体管芯(400 500)耦合至衬底。每个支柱(300 306 502)的最大顺应性方向可以与由半导体管芯(400 500)和衬底的不相等的热膨胀和收缩引起的最大应力的方向对准。支柱(300 306 502)可以被设计和构造成具有特定柔度特性和最大柔度的特定方向(302 304 308 310 504)的各种形状。可以根据支柱(300 306 502)在模具(400 500)上的位置来选择其形状和取向,以适应其位置处的应力的方向和大小。通过在管芯(600)上的焊盘上对诸如钝化材料之类的材料(604)进行构图以增加在其上电镀或沉积支柱(610)的表面积,也可以将支柱(610)制成特定形状。

著录项

  • 公开/公告号IN2014MN00206A

    专利类型

  • 公开/公告日2015-08-21

    原文格式PDF

  • 申请/专利权人 QUALCOMM INC;

    申请/专利号IN206/MUMNP/2014

  • 发明设计人 BAO ZHONGPING;BURRELL JAMES D;GU SHIQUN;

    申请日2014-01-31

  • 分类号H01L21/60;H01L23/485;

  • 国家 IN

  • 入库时间 2022-08-21 15:14:39

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