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Hybrid plasma jet with surface wave for exciting highly reactive discharges

机译：具有表面波的混合等离子体射流，用于激发高反应性放电

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Hybrid plasma nozzle surface wave for excitation of the reactive discharge, intended in particular for incorporation in a vacuum deposition system for the deposition of thin films comprising a vacuum chamber (1), in whose interior space (101) is installed in the area (2) for accommodating the substrate, and in which is introduced at least one quartz work pipe (5) which is connected to an external source of the working gas, which is ended to close surface (2) for receiving the substrate and which extends outside the vacuum chamber (1) body surfatron (6), which is connected to the microwave generator (7), where the nature of the invention consists in that each quartz working tube (5) into a vacuum chamber (1) introduced through a quartz bushing (8) which is provided with a quartz nozzle (9) facing the inner space ( 101) of the vacuum chamber (1), wherein the bottom of the quartz tube working (5) provided with an annular electrode (10) which working quartz tube (5) surrounds and is electrically conductively connected to the RF generator (12).
机译：混合等离子体喷嘴表面波，用于激发反应性放电，特别是用于包含真空腔室（1）的薄膜沉积真空系统中，该腔室的内部空间（101）安装在该区域中（ 2）用于容纳基板，并且在其中引入至少一根石英工作管（5），该石英工作管连接到工作气体的外部源，该石英工作管的端部靠近用于接收基板的封闭表面（2），并延伸到外部真空室（1）体超音速器（6），其连接到微波发生器（7），其中本发明的特征在于，每个石英工作管（5）进入通过石英引入的真空室（1）衬套（8），其设有面对真空腔室（1）的内部空间（101）的石英喷嘴（9），其中石英管工作件（5）的底部设有工作的环形电极（10）石英管（5）环绕并被选中射频导电地连接到射频发生器（12）。

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