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Method and apparatus for determining factors for design consideration in yield analysis
Method and apparatus for determining factors for design consideration in yield analysis
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机译:确定产量分析中设计考虑因素的方法和装置
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摘要
Embodiments of the present invention provide methods and apparatuses for determining factors for design consideration in yield analysis of semiconductor fabrication. In one embodiment, a computer-implemented method for determining factors for design consideration in yield analysis of semiconductor fabrication includes obtaining a geometric characteristic of a defect on a chip and obtaining design data of the chip, where the design data is associated with the defect. The method further includes determining a criticality factor of the defect based on the geometric characteristic and the design data, and outputting the criticality factor.
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