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Fabricating method of carbon nanotube-based field effect transistor and carbon nanotube-based field effect transistor fabricated thereby
Fabricating method of carbon nanotube-based field effect transistor and carbon nanotube-based field effect transistor fabricated thereby
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机译：碳纳米管基场效应晶体管的制造方法和由此制造的碳纳米管基场效应晶体管
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摘要
There are provided a fabricating method of a carbon nanotube-based field effect transistor having an improved binding force with a substrate and a carbon nanotube-based field effect transistor fabricated by the fabricating method. The method includes forming an oxide film on a substrate, forming a photoresist pattern on the oxide film, forming a metal film on the entire surface of the oxide film having the photoresist pattern, removing the photoresist by lifting off, adsorbing carbon nanotubes on the substrate from which the photoresist is removed, performing an annealing process to the substrate to which the carbon nanotubes are adsorbed, and removing the metal film. Since an adhesive strength between a substrate and carbon nanotubes increases, stability and reliability of a field effect transistor can be improved. If the field effect transistor is applied to a liquid sensor or the like, a lifespan of the sensor can be extended and reliability of a measurement result obtained by the sensor can be improved.
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