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Method of manufacturing multi-wavelengths distributed feedback (DFB) laser array including top separate confinement layer having different thickness laser units on the quantum-well layer grown by selective area epitaxial growth
Method of manufacturing multi-wavelengths distributed feedback (DFB) laser array including top separate confinement layer having different thickness laser units on the quantum-well layer grown by selective area epitaxial growth
A method for manufacturing a distributed feedback laser array includes: forming a bottom separate confinement layer on a substrate; forming a quantum-well layer on the bottom separate confinement layer; forming a selective-area epitaxial dielectric mask pattern on the quantum-well layer; forming a top separate confinement layer on the quantum-well layer through selective-area epitaxial growth using the selective-area epitaxial dielectric mask pattern, the top separate confinement layer having different thicknesses for different laser units; removing the selective-area epitaxial dielectric mask pattern; forming an optical grating on the top separate confinement layer; and growing a contact layer on the optical grating. The present disclosure achieves different emission wavelengths for different laser units without significantly affect emission performance of the quantum-well material.
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