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Device and method for manufacturing a particulate filter with regularly spaced micropores
Device and method for manufacturing a particulate filter with regularly spaced micropores
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机译:用于制造具有规则间隔的微孔的颗粒过滤器的装置和方法
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摘要
Various embodiments disclose devices and methods for fabricating microporous particulate filters with regularly spaced pores wherein sheet membrane substrates are exposed to energetic particle radiation through a mask and the damaged regions removed in a suitable developer. The required depth of field is achieved by using energetic particles to minimize diffraction and an energetic particle source with suitably small diameter.
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