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Water quality evaluation apparatus and water quality evaluation method
Water quality evaluation apparatus and water quality evaluation method
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机译：水质评价装置及水质评价方法
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摘要
PROBLEM TO BE SOLVED: To provide a water quality evaluation device and a water quality evaluation method, capable of accurately evaluating influence of impurities contained in sample water on a substrate by suppressing deposition of impurities derived from other than the sample water when the substrate comes in contact with high-purity sample water such as ultrapure water.;SOLUTION: A water quality evaluation device 1, which evaluates water quality of sample water by immersing a substrate 2 in the sample water to collect impurities in the sample water on the substrate 2, has a portable collection container 10 with a sealed internal space 3 for containing the substrate 2 and retaining the sample water. The collection container 10 comprises a container body 12 having an entrance 11 for the substrate, a lid member 13 that closes the entrance 11 for the substrate to form the sealed space 3 together with the container body 12, and a fluid flow means 20 that allows the sample water and clean air to flow in the sealed space 3, having opening and closing means 31 and 41 for allowing a communication between the sealed space 3 and an external part when opened and for cutting off the communication between the sealed space 3 and the external part when closed to keep an airtight state of the sealed space 3.;COPYRIGHT: (C)2012,JPO&INPIT
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