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pattern method evaluation, the evaluation method of the multi-component material, evaluation program, and evaluation device
pattern method evaluation, the evaluation method of the multi-component material, evaluation program, and evaluation device
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机译：图案法评价，多成分材料的评价方法，评价程序以及评价装置
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摘要
To enable the to improve the accuracy and efficiency of the evaluation of a multi-component material. Target FP creating step 173, a target FP peak attributable process 149, the target FP peak feature amount creating step 151, a target FP type 2 generating step 153, the target FP region division feature quantity generating step 155, the target FP feature amount integration and step 157, and an evaluation step 171, creates the target FP integrated characteristic amount by integrating the target FP peak characteristic amount and the interest FP region division feature quantity corresponding to the target FP integration characteristic quantity of interest FP integrated feature quantity It is is characterized in that it has a comparative evaluation with the reference FP integrated feature values based on the plurality of reference FP of the multi-component material to be evaluated criterion.
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