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Composite target for laser deposition and manufacturing method of oxide superconducting wire using the same
Composite target for laser deposition and manufacturing method of oxide superconducting wire using the same
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机译:用于激光沉积的复合靶材及使用该复合靶材的氧化物超导线材的制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a target for laser deposition and a method for producing an oxide superconductive wire material, using the same.SOLUTION: The composite target 1 for laser deposition is used for film formation by depositing atoms, molecules or fine particles, which are released from a surface thereof due to abrasion caused by convergent irradiation of the surface with laser beam 18A, above a substrate 2. The target includes a plurality of target single bodies 13A each having a square planar shape, which are mutually butted in such a manner that their linear peripheries 13a are matched to each other, and the surface difference in level between the butt peripheries of the target single bodies mutually adjoined with the peripheries being butted is 0.5 mm or less.
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