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Composite target for laser deposition and manufacturing method of oxide superconducting wire using the same

机译:用于激光沉积的复合靶材及使用该复合靶材的氧化物超导线材的制造方法

摘要

PROBLEM TO BE SOLVED: To provide a target for laser deposition and a method for producing an oxide superconductive wire material, using the same.SOLUTION: The composite target 1 for laser deposition is used for film formation by depositing atoms, molecules or fine particles, which are released from a surface thereof due to abrasion caused by convergent irradiation of the surface with laser beam 18A, above a substrate 2. The target includes a plurality of target single bodies 13A each having a square planar shape, which are mutually butted in such a manner that their linear peripheries 13a are matched to each other, and the surface difference in level between the butt peripheries of the target single bodies mutually adjoined with the peripheries being butted is 0.5 mm or less.
机译:解决的问题:提供一种用于激光沉积的靶材以及使用该靶材的氧化物超导线材的制造方法。解决方案:用于激光沉积的复合靶材1用于通过沉积原子,分子或微粒来成膜,在基板2的上方,由于由激光束18A会聚照射表面而造成的磨损而从表面释放。目标包括多个目标单体13A,每个目标单体13A具有正方形的平面形状,以这种方式彼此对接。线性周边13a相互匹配的方式,并且与邻接的周边相互邻接的目标单体的邻接周边之间的水平表面差为0.5mm或更小。

著录项

  • 公开/公告号JP5758287B2

    专利类型

  • 公开/公告日2015-08-05

    原文格式PDF

  • 申请/专利权人 株式会社フジクラ;

    申请/专利号JP20110288366

  • 发明设计人 足立 泰;

    申请日2011-12-28

  • 分类号C23C14/24;C23C14/28;H01B13;H01B12/06;C01G1;C01G3;C23C14/08;

  • 国家 JP

  • 入库时间 2022-08-21 15:29:52

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