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RADIATION DETECTION ELEMENT SUBSTRATE, INSPECTION DEVICE FOR RADIATION DETECTION ELEMENT SUBSTRATE AND METHOD FOR INSPECTING RADIATION DETECTION ELEMENT SUBSTRATE
RADIATION DETECTION ELEMENT SUBSTRATE, INSPECTION DEVICE FOR RADIATION DETECTION ELEMENT SUBSTRATE AND METHOD FOR INSPECTING RADIATION DETECTION ELEMENT SUBSTRATE
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机译：辐射检测元素基质，用于辐射检测元素基质的检查装置以及用于检查辐射检测元素基质的方法
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摘要
PROBLEM TO BE SOLVED: To provide a radiation detection element substrate capable of inspecting a radiation detection element substrate having a plurality of transistors in one pixel without drastically adding or changing of the inspection device for the radiation detection element substrate having one transistor in one pixel, an inspection device for the radiation detection element substrate, and a method for inspecting the radiation detection element substrate.SOLUTION: A connection wiring part 22 for inspection in which control wirings M extend to the outside than a mounting substrate and are connected to each other, is provided. The gate off voltage is applied to wiring terminals 24 at one time, connected to the connection wiring part 22 for inspection, to perform the inspection.
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