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PHASE CONTRAST IMAGE FORMATION, AND ADJUSTMENT OF TEM FOR PHASE CONTRAST IMAGE FORMATION

机译:相衬图像形成和相衬图像形成的TEM调整

摘要

PROBLEM TO BE SOLVED: To provide a novel method for phase contrast image formation in a transmission electron microscopy.;SOLUTION: In the method, an imaging electron beam itself is used to adjust a hole-free thin film for use as an actual phase plate, in some cases eliminating the need for ex-situ fabrication of a hole and reducing requirements for the precision of ZPP hardware. The electron optical properties of the ZPP hardware are modified primarily in two ways: by boring a hole using the electron beam; and/or by modifying the electro-optical properties by charging induced by the primary beam. Furthermore a method where a sample is focused by a lens downstream from the ZPP hardware is disclosed. A method for transferring a back focal plane of an objective lens to the aperture plane of a selected area and an optional plane conjugated with the back focal plane of the objective lens is also provided.;COPYRIGHT: (C)2015,JPO&INPIT
机译:要解决的问题:提供一种在透射电子显微镜中形成相衬图像的新颖方法;解决方案:该方法中,成像电子束本身用于调节无孔薄膜,以用作实际的相板,在某些情况下,无需异地制造孔,并降低了对ZPP硬件精度的要求。 ZPP硬件的电子光学特性主要通过以下两种方式进行修改:通过使用电子束打孔;和/或通过由初级光束感应产生的电荷来改变电光特性。此外,公开了一种通过ZPP硬件下游的透镜聚焦样品的方法。还提供了一种将物镜的后焦平面转移到选定区域的光圈平面以及与物镜的后焦平面共轭的可选平面的方法。版权所有:(C)2015,JPO&INPIT

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