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APPARATUS OF PREDICTING WORK CONVERSION DIFFERENCE, METHOD OF PREDICTING WORK CONVERSION DIFFERENCE AND PROGRAM OF PREDICTING WORK CONVERSION DIFFERENCE
APPARATUS OF PREDICTING WORK CONVERSION DIFFERENCE, METHOD OF PREDICTING WORK CONVERSION DIFFERENCE AND PROGRAM OF PREDICTING WORK CONVERSION DIFFERENCE
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机译：预测工作转换差异的装置，预测工作转换差异的方法以及预测工作转换差异的程序
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摘要
PROBLEM TO BE SOLVED: To provide an apparatus of predicting work conversion difference capable of improving prediction accuracy of work conversion difference.SOLUTION: A resist dimension calculation section 11a calculates a relationship between parameters of lithography and a prediction value CDof resist dimensions by means of simulation. A resist depth determination section 11b determines the prediction value CDof resist dimensions of a depth in a thickness direction of a resist film suitable for the relationship between the parameters of lithography and measured values DR of the resist dimensions on the basis of a simulation result of a cross-sectional shape of a resist pattern MR. A resist shape calculation section 11c calculates the cross-sectional shape of the resist pattern MR on the basis of the simulation result of the cross-sectional shape of the resist pattern MR.
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