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Semiconductor device with epitaxially grown active layer adjacent a subsequently grown optically passive region
Semiconductor device with epitaxially grown active layer adjacent a subsequently grown optically passive region
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机译:具有与随后生长的光学无源区相邻的外延生长的有源层的半导体器件
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摘要
A semiconductor device 1 comprising an optically passive aspect 2 and an optically active material 3 wherein the optically passive aspect 2 further comprises at least a crystalline seed layer (4), the optically active material 3 being epitaxially grown in a predefined structure 5 provided in the optically passive aspect 2 that extends to at least an upper surface 4 of the seed layer 4, and the optically passive aspect 2 is structured to comprise a passive photonic structure 6 subsequent to the growth of the optically active material 3. The active material 3 may be implemented as a light emitting structure e.g. a laser, an LED or a optical amplifier amongst others. The predefined structure 5 may be a hole or a trench. The photonic structure 6 may be a waveguide. The device may include a VCSEL. Holes (11 in figure 4) may be formed in the photonic structure 6 and the active region 3. The size of the holes may be tapered to increase towards the photonic structure 6 or may be the same size. The device may comprise a 2D photonic crystal.
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