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Semiconductor device with epitaxially grown active layer adjacent a subsequently grown optically passive region

机译:具有与随后生长的光学无源区相邻的外延生长的有源层的半导体器件

摘要

A semiconductor device 1 comprising an optically passive aspect 2 and an optically active material 3 wherein the optically passive aspect 2 further comprises at least a crystalline seed layer (4), the optically active material 3 being epitaxially grown in a predefined structure 5 provided in the optically passive aspect 2 that extends to at least an upper surface 4 of the seed layer 4, and the optically passive aspect 2 is structured to comprise a passive photonic structure 6 subsequent to the growth of the optically active material 3. The active material 3 may be implemented as a light emitting structure e.g. a laser, an LED or a optical amplifier amongst others. The predefined structure 5 may be a hole or a trench. The photonic structure 6 may be a waveguide. The device may include a VCSEL. Holes (11 in figure 4) may be formed in the photonic structure 6 and the active region 3. The size of the holes may be tapered to increase towards the photonic structure 6 or may be the same size. The device may comprise a 2D photonic crystal.
机译:半导体器件1,其包括光学无源方面2和光学活性材料3,其中光学无源方面2进一步包括至少晶体籽晶层(4),光学有源材料3以预定的结构5外延生长,该预定的结构5设置在半导体层1中。至少延伸到种子层4的上表面4的光学无源方面2,并且光学无源方面2被构造为在光学活性材料3生长之后包括无源光子结构6。活性材料3可以被实现为发光结构,例如激光,LED或光学放大器等。预定结构5可以是孔或沟槽。光子结构6可以是波导。该设备可以包括VCSEL。可以在光子结构6和有源区3中形成孔(图4中的11)。孔的尺寸可以是渐缩的以朝向光子结构6增加或者可以是相同的尺寸。该装置可以包括2D光子晶体。

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