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Micro-fluidic system, has system components thermally connected with each other, where membrane is located in recess that is formed in system components, which comprise structure raising from recess and clamping membrane
Micro-fluidic system, has system components thermally connected with each other, where membrane is located in recess that is formed in system components, which comprise structure raising from recess and clamping membrane
The system (1) has two planar system components (2, 4) at whose surfaces two cavities (3) are formed to a surface. A membrane (8) is arranged between the system components for disconnection of the cavities. The system components are thermally connected with each other. The membrane is located in a recess (6) that is formed in the system components. The system components comprise a structure raising from the recess and clamping the membrane. A substrate (11) is made of a printed circuit board material. The membrane comprises a perforation. The membrane is partially made of a plastic deformable material containing paraffin or a paraffin-coated film. An independent claim is also included for a method for manufacturing a micro-fluidic system.
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