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Method for correcting reflected radiation portion in electromagnetic radiation of investigation object, involves assigning numerical value of reflected radiation portion corresponds to certain solid angle region from radiation
Method for correcting reflected radiation portion in electromagnetic radiation of investigation object, involves assigning numerical value of reflected radiation portion corresponds to certain solid angle region from radiation
The method involves determining solid angle regions in test structure such as specimen by detecting reflected electromagnetic radiation (4) of investigation object (5), from which detected reflected radiation is incident on test structure. The numerical value of reflected radiation portion (7) corresponds to certain solid angle region is assigned from the sensed reflected electromagnetic radiation of investigation object. An independent claim is included for measurement device.
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