1. A tunable oscillator cryogenic generator for integrated receivers subteragertcovoj range based distributed tunnel junction superconductor-insulator-superconductor fabricated on a substrate of crystalline insulating material, characterized in that the reverse side of the substrate is roughened, with the size of irregularities commensurate with the wavelength of sound subteragertcovoj range podlozhke.2 crystal. Structure according to claim 1, characterized in that the substrate is made of a high purity crystalline kremniya.3. Structure according to claim 2, characterized in that the size of the reverse side of the silicon substrate inhomogeneities in the range 20-1000 nm.4. Structure according to claim 1, characterized in that the substrate is made of crystalline quartz, MgO or other crystalline material which is suitable for the manufacture of tunnel junctions mikroelektroniki.5 methods. Structure according to claim 1, characterized in that the lower electrode superconducting tunnel junction is made of Nb, a upper - of NbN or NbTiN.6. Structure according to claim 1, characterized in that the insulator tunneling structure formed of AlN or MgO.7. Structure according to claim 1, characterized in that the two superconductor formed of NbN or NbTiN.
展开▼
