OPTICAL APPARATUSES INCLUDING METAL-ASSISTED CHEMICAL ETCHING METHOD USING VERTICAL NANOWIRES AND THE METHOD FOR MANUFACTURING THE SAME.

• 1. 一种基于金属辅助化学刻蚀技术制备硅纳米线阵列的方法 [P] . 中国专利： CN107634005A . 2018-01-26
• 2. 包括金属纳米线和金属纳米粒子的传导金属网络以及制造其的方法 [P] . 中国专利： CN107155365B . 2019.05.24
• 3. OPTICAL APPARATUSES INCLUDING METAL-ASSISTED CHEMICAL ETCHING METHOD USING VERTICAL NANOWIRES AND THE METHOD FOR MANUFACTURING THE SAME. [P] . 韩国专利： KR20140102451A . 2014-08-22

  机译： 光学设备包括使用垂直纳米线的金属辅助化学刻蚀方法及其制造方法。

• 4. METHOD FOR FABRICATING VERTICAL-TYPE NANOSTRUCTURE USING METAL ASSISTED CHEMICAL ETCHING METHOD, VERTICAL SILICON NANOSTRUCTURE FABRICATED BY METHOD, AND DEVICE INCLUDING VERTICAL-TYPE SILICON NANOSTRUCTURE [P] . 韩国专利： KR101353373B1 . 2014-01-21

  机译： 利用金属辅助化学刻蚀法制造垂直型纳米结构的方法，制造该方法的垂直硅纳米结构以及包括垂直型硅纳米结构的装置

• 5. METHOD FOR MANUFACTURING A NANOWIRE AND AN ELECTRONIC ELEMENT INCLUDING THE NANOWIRE CAPABLE OF FORMING THE NANOWIRE IN A HORIZONTAL DIRECTION OR A VERTICAL DIRECTION [P] . 韩国专利： KR20110101287A . 2011-09-16

  机译： 制造包括水​​平方向或垂直方向的纳米线的纳米线和电子元件的方法

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• 4. Achieving a sub-10 nm nanopore array in silicon by metal-assisted chemical etching and machine learning [J] . Yun Chen, Yanhui Chen, Junyu Long, 极端制造（英文） . 2021,第003期
• 5. Hybrid Anodic and Metal-Assisted Chemical Etching Method Enabling Fabrication of Silicon Carbide Nanowires [J] . Yun Chen, Cheng Zhang, Liyi Li, Small . 2019,第7期
• 6. A facile synthesis of silicon nanowires/micropillars structure using lithography and metal-assisted chemical etching method [J] . Yilian Xi, Weijia Zhang, Zhiqiang Fan, Journal of Solid State Chemistry . 2018,第期
• 7. Fabricating and Controlling Silicon Zigzag Nanowires by Diffusion-Controlled Metal-Assisted Chemical Etching Method [J] . Chen Yun, Zhang Cheng, Li Liyi, Nano letters . 2017,第7期
• 8. The Formation of Porous Structure in Silicon by the Methods of Metal-Assisted Chemical Etching and Electrochemical Etching [C] . Konstantin V. Krukovskii, Oleg A. Kashin, Alexander I. Lotkov International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures . 2019
• 9. Semiconductor Nanofabrication via Metal-Assisted Chemical Etching: Ternary III-V Alloys and Alternative Catalysts [D] . Wilhelm, Thomas S. 2019
• 10. Formation of silicon nanowire packed films from metallurgical-grade silicon powder using a two-step metal-assisted chemical etching method [O] . Rachid Ouertani, Abderrahmen Hamdi, Chohdi Amri, 2014
• 11. Formation of silicon nanowire packed films from metallurgical-grade silicon powder using a two-step metal-assisted chemical etching method [O] . 2014

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