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Method for formation of micro- and nano-scale patterns and method for producing micro- and nano-scale channel transistor, and micro- and nano-scale channel light emitting transistor using the same
Method for formation of micro- and nano-scale patterns and method for producing micro- and nano-scale channel transistor, and micro- and nano-scale channel light emitting transistor using the same
one aspect of the present invention for fine pattern formation according to the method is provided . The fine pattern forming method comprising: forming a circular or an organic -inorganic hybrid wire or wire with a cross section of an elliptical mask pattern on a substrate; Forming a material layer on the front ( ) of the organic -inorganic hybrid wire or a wire mask pattern is formed above the substrate ; And removing the organic -inorganic hybrid wire or wire mask pattern from the substrate only to remain the material layer of the organic -inorganic hybrid wire or wires of the pattern mask is not formed ; Includes . ;
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